Photomicrosensors for detecting wafer-carrier mounting.
| Catalog Name | Catalog Number | Download |
|---|---|---|
| EE-SPY801/SPY802 Data Sheet | – | EE-SPY801/SPY802 Data Sheet |
| Manual Name | Catalog Number | Download |
|---|---|---|
| [Instruction Sheet] EE-SPY801/802 Built-in Amplifier Photomicrosensor (ENG/JPN) | 1610539-7B | [Instruction Sheet] EE-SPY801/802 Built-in Amplifier Photomicrosensor (ENG/JPN) |
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EE-SPY801 / 802